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Scanning electron microscopes (SEM) are essential tools
for quality control, analytical testing, and materials development, employed
widely from production lines to research and development laboratories.
Applications include research and education, materials development in the
fields of materials science, semiconductor, and biochemistry, product
testing, evaluation, failure analysis, and quality control in the areas of
electronics, machinery, automobile, construction, food, textile, and
chemicals.
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| Resolution (High Vacuum Mode): |
3.5nm |
| Accelerating voltage: |
x0.5 to 30kV (53 steps) |
| Images: |
SEI,BEI( COMPO, TOPO,Shadow) |
| Magnification |
x18 to 300,000(in 136 steps) |
| Specimen size |
< 150mm |
| Specimen stage |
Eucentric goniometer X=80mm, Y=40mm, Z=5 to 48mm, T=-10 to 90, R=360 |
| Electron Gun |
W filament |
| Gun Bias |
Automatically settable for all accelerating voltages |
| Image Shift |
+12 micrometer or -12 micrometer |
| Displayed image |
640 x 480 pixels |
| Analytical Functions |
Oxford ISIS EDS system |
| Detectable element range: |
5B to92U |
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