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The JXA-8900 SuperProbe is an Electron Probe Microanalyzer (EPMA). The combination of up to 4 wavelength dispersive X-ray spectrometers (WDS) and an energy dispersive X-ray spectrometer (EDS) assures the most efficient and accurate analysis. Computer input analyzes data from the two types of X-ray spectrometers and presents the data as a unified analysis. The WD/ED combined system can simultaneously analyze up to 12 elements (4 WDS, 8 EDS).

The WD/ED combined microanalyzer provides for:
bullet Higher detection sensitivity for trace elements
bullet Higher accuracy of quantitative analysis
bullet Higher resolving power (resolution) for adjacent X-rays
bullet Higher accuracy of quantitative analysis for light elements
The automated stage can handle samples up to 6" x 6" x 2" through the airlock, and can reposition a sample to less than 0.5um.

Specifications

Detectable element range: 4Be to 92U
Detectable wavelength range: 0.087 to 9.3nm
Number of X-ray spectrometers: 4 WDS, 1 EDS
Specimen size: 150mm x 150mm x 50mm
X - Y Range 100mm x 100mm
Specimen stage drive speed: 15mm/s max
Accelerating voltage: 0.2 to 40kV (100V steps)
Probe current range: 10-12 to 10-5A
Probe current stability: 1 x 10-3/h
Imaging: SEI, BEI (TOPO and COMPO), Cathodoluminescence
Scanning image magnification: x40 to 300 000 (WD: 11mm)